A fully custom designed Automatic Measurement System has been realized in order to acquire degradation data on thin-film AlCu metal test patterns, performing 4-wire resistive measures. A thermal reliability test is performed and degradation data are presented.

A measurement system for the acquisition of degradation data in AlCu metallizations / Catelani, M; Nicoletti, R.; Baggiani, M.; Singuaroli, R.. - STAMPA. - 1:(2002), pp. 511-515. (Intervento presentato al convegno 19th IEEE Instrumentation and Measurement Technology Conference tenutosi a Anchorage, AK, usa nel 2002).

A measurement system for the acquisition of degradation data in AlCu metallizations

CATELANI, MARCANTONIO;Singuaroli, R.
2002

Abstract

A fully custom designed Automatic Measurement System has been realized in order to acquire degradation data on thin-film AlCu metal test patterns, performing 4-wire resistive measures. A thermal reliability test is performed and degradation data are presented.
2002
Conference Record - IEEE Instrumentation and Measurement Technology Conference
19th IEEE Instrumentation and Measurement Technology Conference
Anchorage, AK, usa
2002
Catelani, M; Nicoletti, R.; Baggiani, M.; Singuaroli, R.
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Utilizza questo identificatore per citare o creare un link a questa risorsa: https://hdl.handle.net/2158/1050214
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