Ge-on-Si substrates, made by a thin Ge relaxed layer with a low threading dislocation density and reduced surface roughness deposited on Si, are capable of accommodating the mismatch between GaAs and Si substrate and can be used for the growth of high quality AlGaAs/GaAs layers and of GaAs nanostructures by droplet epitaxy, while maintaining a low thermal budget compatible with the integration of CMOS devices.

Fabrication of Ge-on-Si substrates for the integration of high-quality GaAs nanostructures on Si / Bietti, S.; Cecchi, S.; Frigeri, C.; Grilli, E.; Fedorov, A.; Vinattieri, A.; Gurioli, M.; Isella, G.; Sanguinetti, S.. - In: ECS TRANSACTIONS. - ISSN 1938-5862. - STAMPA. - 50:(2012), pp. 783-789. (Intervento presentato al convegno 5th SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 220th ECS Meeting tenutosi a Honolulu, HI, usa nel 2012) [10.1149/05009.0783ecst].

Fabrication of Ge-on-Si substrates for the integration of high-quality GaAs nanostructures on Si

VINATTIERI, ANNA;GURIOLI, MASSIMO;
2012

Abstract

Ge-on-Si substrates, made by a thin Ge relaxed layer with a low threading dislocation density and reduced surface roughness deposited on Si, are capable of accommodating the mismatch between GaAs and Si substrate and can be used for the growth of high quality AlGaAs/GaAs layers and of GaAs nanostructures by droplet epitaxy, while maintaining a low thermal budget compatible with the integration of CMOS devices.
2012
ECS Transactions
5th SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 220th ECS Meeting
Honolulu, HI, usa
2012
Bietti, S.; Cecchi, S.; Frigeri, C.; Grilli, E.; Fedorov, A.; Vinattieri, A.; Gurioli, M.; Isella, G.; Sanguinetti, S.
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Utilizza questo identificatore per citare o creare un link a questa risorsa: https://hdl.handle.net/2158/1089061
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