A fully custom designed Automatic Measurement System has been realized in order to acquire degradation data on thin-film AlCu metal test patterns, performing 4-wire resistive measures. A thermal reliability test is performed and degradation data are presented.
A measurement system for the acquisition of degradation data in AlCu metallizations / Catelani, M; Nicoletti, R.; Baggiani, M.; Singuaroli, R.. - STAMPA. - 1:(2002), pp. 511-515. (Intervento presentato al convegno 19th IEEE Instrumentation and Measurement Technology Conference tenutosi a Anchorage, AK, usa nel 2002).
A measurement system for the acquisition of degradation data in AlCu metallizations
CATELANI, MARCANTONIO;Singuaroli, R.
2002
Abstract
A fully custom designed Automatic Measurement System has been realized in order to acquire degradation data on thin-film AlCu metal test patterns, performing 4-wire resistive measures. A thermal reliability test is performed and degradation data are presented.
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