In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a “loss shield” for a circular membrane. In this device the vibrations of the membrane, with a quality factor of 10^7, reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures.

Control of recoil losses in nanomechanical SiN membrane resonators / Borrielli, A.; Marconi, L.; Marin, F.; Marino, F.; Morana, B.; Pandraud, G.; Pontin, A.; Prodi, G.A.; Sarro, P.M.; Serra, E.; Bonaldi, M.. - In: PHYSICAL REVIEW. B. - ISSN 2469-9950. - STAMPA. - 94:(2016), pp. 121403-121403. [10.1103/PhysRevB.94.121403]

Control of recoil losses in nanomechanical SiN membrane resonators

MARCONI, LORENZO;MARIN, FRANCESCO;MARINO, FRANCESCO MARIO SIMONE;PONTIN, ANTONIO;
2016

Abstract

In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a “loss shield” for a circular membrane. In this device the vibrations of the membrane, with a quality factor of 10^7, reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures.
2016
94
121403
121403
Borrielli, A.; Marconi, L.; Marin, F.; Marino, F.; Morana, B.; Pandraud, G.; Pontin, A.; Prodi, G.A.; Sarro, P.M.; Serra, E.; Bonaldi, M.
File in questo prodotto:
File Dimensione Formato  
2016_PRB.pdf

Accesso chiuso

Descrizione: Articolo principale
Tipologia: Pdf editoriale (Version of record)
Licenza: DRM non definito
Dimensione 844.08 kB
Formato Adobe PDF
844.08 kB Adobe PDF   Richiedi una copia
2016_PRB.pdf

Accesso chiuso

Descrizione: Articolo principale
Dimensione 844.08 kB
Formato Unknown
844.08 kB Unknown   Richiedi una copia

I documenti in FLORE sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificatore per citare o creare un link a questa risorsa: https://hdl.handle.net/2158/1066423
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 20
  • ???jsp.display-item.citation.isi??? 18
social impact