We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate isolated site-controlled QDs via a spatially selective hydrogenation at the nanometer- scale. A deterministic integration of the realized site-controlled QDs with PhC nanocavities is provided by the inherent realignment precision (~20 nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity

A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides / Pettinari, G.; Gerardino, A.; Businaro, L.; Polimeni, A.; Capizzi, M.; Hopkinson, M.; Rubini, S.; Biccari, F.; Intonti, F.; Vinattieri, A.; Gurioli, M.; Felici, M.. - In: MICROELECTRONIC ENGINEERING. - ISSN 0167-9317. - STAMPA. - 174:(2017), pp. 16-19. [10.1016/j.mee.2016.12.003]

A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides

BICCARI, FRANCESCO;INTONTI, FRANCESCA;VINATTIERI, ANNA;GURIOLI, MASSIMO;
2017

Abstract

We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate isolated site-controlled QDs via a spatially selective hydrogenation at the nanometer- scale. A deterministic integration of the realized site-controlled QDs with PhC nanocavities is provided by the inherent realignment precision (~20 nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity
2017
174
16
19
Pettinari, G.; Gerardino, A.; Businaro, L.; Polimeni, A.; Capizzi, M.; Hopkinson, M.; Rubini, S.; Biccari, F.; Intonti, F.; Vinattieri, A.; Gurioli, M.; Felici, M.
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Utilizza questo identificatore per citare o creare un link a questa risorsa: https://hdl.handle.net/2158/1074846
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