Realization of conducting polymer actuators using a controlled volume microsyringe system

This paper presents a new microfabrication technique for bender-type electromechanical actuators made of conducting polymers. The technique is based on a computer-controlled deposition of the active material with a microsyringe. The paper describes the developed microfabrication system and proposes a simple deposition model used for an accurate control of the thickness of deposited layers. The realization of solid-state bimorph bender actuators made of polyaniline and a solid polymer electrolyte is presented. Prototype actuators fabricated with the new technique and stimulated in air with square wave potential differences ranging between −0.5 and +1 V showed bending angles higher than ±60◦.