In this article the synthesis of novel heterobimetallic precursors of the formula [RE(hfa) 4 ] - [Na·tetraglyme] + [RE = Y, Gd; Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme = 2,5,8,11,14-pentaoxapentadecane] is reported. This complex can be efficiently used as a single source for the metal-organic chemical vapor deposition of NaREF 4 films.
Heterobimetallic Sodium Rare-Earth Complexes: "third-Generation" MOCVD Precursors for the Deposition of NaREF 4 (RE = Y, Gd) Films / Battiato, Sergio; Rossi, Patrizia; Paoli, Paola; Malandrino, Graziella*. - In: INORGANIC CHEMISTRY. - ISSN 0020-1669. - ELETTRONICO. - 57:(2018), pp. 15035-15039. [10.1021/acs.inorgchem.8b02267]
Heterobimetallic Sodium Rare-Earth Complexes: "third-Generation" MOCVD Precursors for the Deposition of NaREF 4 (RE = Y, Gd) Films
Rossi, PatriziaMembro del Collaboration Group
;Paoli, PaolaMembro del Collaboration Group
;Malandrino, Graziella
2018
Abstract
In this article the synthesis of novel heterobimetallic precursors of the formula [RE(hfa) 4 ] - [Na·tetraglyme] + [RE = Y, Gd; Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme = 2,5,8,11,14-pentaoxapentadecane] is reported. This complex can be efficiently used as a single source for the metal-organic chemical vapor deposition of NaREF 4 films.
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