The current technological process has mainly interested in integrating MEMS devices in most technological devices to offer complete control and awareness about a particular process or system. Such devices, which in most cases include gyroscope, accelerometer, and magnetometer, are fully integrated on a single chip and have a cost not higher than few dollars. Recently they have been more employed in embedded systems devoted to the autonomous driving operation for terrestrial and aeronautical vehicles. Such devices are often deployed to the market with datasheet reporting their characteristic without highlighting their behavior under particular environmental conditions. Most MEMS devices are mounted in a very harsh environment, characterized by high-temperature excursion and vibration from different sources. The authors propose a temperature stress test for such devices and evaluate their behavior under static conditions. Experimental results will evidence the accelerometer and gyroscope MEMS sensors' dependence on the temperature in a range of -10°C to 50°C.
Analysis of MEMS devices under temperature stress test / Capriglione D.; Carratu M.; Catelani M.; Ciani L.; Patrizi G.; Pietrosanto A.; Singuaroli R.; Sommella P.. - ELETTRONICO. - (2021), pp. 63-68. (Intervento presentato al convegno 8th IEEE International Workshop on Metrology for AeroSpace, MetroAeroSpace 2021 tenutosi a Virtual, Online; Italy nel 22 June 2021 through 25 June 2021) [10.1109/MetroAeroSpace51421.2021.9511744].
Analysis of MEMS devices under temperature stress test
Catelani M.;Ciani L.;Patrizi G.;Singuaroli R.;
2021
Abstract
The current technological process has mainly interested in integrating MEMS devices in most technological devices to offer complete control and awareness about a particular process or system. Such devices, which in most cases include gyroscope, accelerometer, and magnetometer, are fully integrated on a single chip and have a cost not higher than few dollars. Recently they have been more employed in embedded systems devoted to the autonomous driving operation for terrestrial and aeronautical vehicles. Such devices are often deployed to the market with datasheet reporting their characteristic without highlighting their behavior under particular environmental conditions. Most MEMS devices are mounted in a very harsh environment, characterized by high-temperature excursion and vibration from different sources. The authors propose a temperature stress test for such devices and evaluate their behavior under static conditions. Experimental results will evidence the accelerometer and gyroscope MEMS sensors' dependence on the temperature in a range of -10°C to 50°C.I documenti in FLORE sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.