The possibility to locally incorporate/remove hydrogen atoms in/from dilute-nitride semiconductors is demonstrated. This method can be applied to the fabrication of site-controlled single-photon emitters but also to the optimization/fabrication of photonic devices, via refractive-index engineering.

Spatially selective hydrogen irradiation/removal of dilute nitrides: A versatile nanofabrication tool for photonic applications / Felici M.; Pettinari G.; Biccari F.; Younis S.; Sharma M.; Rubini S.; Gerardino A.; Gurioli M.; Vinattieri A.; Intonti F.; Polimeni A.. - ELETTRONICO. - 2019:(2019), pp. 0-0. ( Quantum Information and Measurement, QIM 2019 ita 2019) [10.1364/QIM.2019.T5A.27].

Spatially selective hydrogen irradiation/removal of dilute nitrides: A versatile nanofabrication tool for photonic applications

Felici M.;Pettinari G.;Biccari F.;Gurioli M.;Vinattieri A.;Intonti F.;Polimeni A.
2019

Abstract

The possibility to locally incorporate/remove hydrogen atoms in/from dilute-nitride semiconductors is demonstrated. This method can be applied to the fabrication of site-controlled single-photon emitters but also to the optimization/fabrication of photonic devices, via refractive-index engineering.
2019
Optics InfoBase Conference Papers
Quantum Information and Measurement, QIM 2019
ita
2019
Felici M.; Pettinari G.; Biccari F.; Younis S.; Sharma M.; Rubini S.; Gerardino A.; Gurioli M.; Vinattieri A.; Intonti F.; Polimeni A.
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Utilizza questo identificatore per citare o creare un link a questa risorsa: https://hdl.handle.net/2158/1451212
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