The possibility to locally incorporate/remove hydrogen atoms in/from dilute-nitride semiconductors is demonstrated. This method can be applied to the fabrication of site-controlled single-photon emitters but also to the optimization/fabrication of photonic devices, via refractive-index engineering.
Spatially selective hydrogen irradiation/removal of dilute nitrides: A versatile nanofabrication tool for photonic applications / Felici M.; Pettinari G.; Biccari F.; Younis S.; Sharma M.; Rubini S.; Gerardino A.; Gurioli M.; Vinattieri A.; Intonti F.; Polimeni A.. - ELETTRONICO. - 2019:(2019), pp. 0-0. ( Quantum Information and Measurement, QIM 2019 ita 2019) [10.1364/QIM.2019.T5A.27].
Spatially selective hydrogen irradiation/removal of dilute nitrides: A versatile nanofabrication tool for photonic applications
Felici M.;Pettinari G.;Biccari F.;Gurioli M.;Vinattieri A.;Intonti F.;Polimeni A.
2019
Abstract
The possibility to locally incorporate/remove hydrogen atoms in/from dilute-nitride semiconductors is demonstrated. This method can be applied to the fabrication of site-controlled single-photon emitters but also to the optimization/fabrication of photonic devices, via refractive-index engineering.I documenti in FLORE sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.



