Compact High-Q Photonic Crystal Cavities with Improved Robustness to Disorder

Compact photonic crystal cavities enable dense integration but typically require large footprints to achieve high Q-factors, increasing sensitivity to fabrication disorder. We present high-Q, small-footprint cavities optimized through a nonHermitian perturbation theory framework, where periodicity breaking enhances resilience to fabrication-induced disorder as demonstrated by the near-field scanning optical microscopy experiment.