We have investigated the feasibility of humiditysensorsbased on nanostructuredcarbon (ns-C) filmsproduced by supersonicclusterbeamdeposition (SCBD). The ns-C films have been obtained using pure He as the buffer gas in the pulsed microplasma cluster source (PMCS). Films of different thickness (1–10 μm) were deposited on Au contacts: resistive- and capacitive-type devices were manufactured. Resistive sensor show a flat response for relative humidity (%RH) up to 60%. Preliminary measurements performed on capacitive-type devices at room temperature in the relative humidity range 10–70% showed a linear dependence of the capacitance on RH%. Fast rise times and a sensitivity of the order of 0.1–0.5 pF/%RH favourably compare with standard commercial sensors and other advanced capacitive devices made with polymers.
First study of humidity sensors based on nanostructured carbon films produced by supersonic cluster beam deposition / M. BRUZZI; S. MIGLIO; M. SCARINGELLA; G. BONGIORNO; P. PISERI; A. PODEST AND P. MILANI. - In: SENSORS AND ACTUATORS. B, CHEMICAL. - ISSN 0925-4005. - STAMPA. - 100:(2004), pp. 173-176. [10.1016/j.snb.2003.12.046]
First study of humidity sensors based on nanostructured carbon films produced by supersonic cluster beam deposition
BRUZZI, MARA;
2004
Abstract
We have investigated the feasibility of humiditysensorsbased on nanostructuredcarbon (ns-C) filmsproduced by supersonicclusterbeamdeposition (SCBD). The ns-C films have been obtained using pure He as the buffer gas in the pulsed microplasma cluster source (PMCS). Films of different thickness (1–10 μm) were deposited on Au contacts: resistive- and capacitive-type devices were manufactured. Resistive sensor show a flat response for relative humidity (%RH) up to 60%. Preliminary measurements performed on capacitive-type devices at room temperature in the relative humidity range 10–70% showed a linear dependence of the capacitance on RH%. Fast rise times and a sensitivity of the order of 0.1–0.5 pF/%RH favourably compare with standard commercial sensors and other advanced capacitive devices made with polymers.I documenti in FLORE sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.