Humidity sensors based on cluster assembled nanostructured carbon films in capacitive configuration have been fabricated and characterized. An electronic read-out system has been designed and implemented in order to measure the complex impedance of the device under operation. The sensor and read-out electronics provide a fully integrated and cost-effective system. Devices under test show a fast dynamic response and a good sensitivity compared to capacitive commercial systems. A linear response is observed for relative humidity in the range up to 70%. Hysteresis is practically absent in this range, while for higher values it is at most in the order of 2%.
Development of humidity sensors based on nanostructured carbon films / S. Miglio; M. Bruzzi; M. Scaringella; D. Menichelli; E. Leandri; A. Baldi; G. Bongiorno; P. Piseri; P. Milani. - In: SENSORS AND ACTUATORS. B, CHEMICAL. - ISSN 0925-4005. - STAMPA. - 111-112:(2005), pp. 140-144. [10.1016/j.snb.2005.06.044]
Development of humidity sensors based on nanostructured carbon films
MIGLIO, STEFANIA;BRUZZI, MARA;SCARINGELLA, MONICA;MENICHELLI, DAVID;BALDI, ANDREA;
2005
Abstract
Humidity sensors based on cluster assembled nanostructured carbon films in capacitive configuration have been fabricated and characterized. An electronic read-out system has been designed and implemented in order to measure the complex impedance of the device under operation. The sensor and read-out electronics provide a fully integrated and cost-effective system. Devices under test show a fast dynamic response and a good sensitivity compared to capacitive commercial systems. A linear response is observed for relative humidity in the range up to 70%. Hysteresis is practically absent in this range, while for higher values it is at most in the order of 2%.I documenti in FLORE sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.