Interferometric characterization of mono- and polycrystalline CVD diamond

Vannoni, Maurizio; Molesini, Giuseppe; Sciortino, Silvio; Lagomarsino, Stefano; Olivero, P.

doi:10.1117/12.827535

Mono and polycrystalline Chemical Vapor Deposited (CVD) diamond is a promising material for several advanced topics: microchips substrate, biological applications, UV and particle detection. Commercial CVD diamonds are available in small square size, commonly 3-5 millimeters side and 0.5-1.5 millimeters thickness. To improve diamond reliability for described applications, it is important to have a quality control on diamond samples, not only for electrical constants but also for optical characteristics and surface roughness. In this paper we present an optical characterization method based on interferometric instruments, to measure surface structure and internal homogeneity of mono ad polycrystalline commercial CVD diamonds, with measurement examples.

Interferometric characterization of mono- and polycrystalline CVD diamond / M. Vannoni; G. Molesini; S. Sciortino; S. Lagomarsino; P. Olivero. - STAMPA. - 7389:(2009), pp. 738931-1-738931-6. ((Intervento presentato al convegno Optical Measurement Systems for Industrial Inspections VI, SPIESPIE tenutosi a Munich, Germany nel 15-18 June 2009 [10.1117/12.827535].

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Titolo:	Interferometric characterization of mono- and polycrystalline CVD diamond
Autori di Ateneo:	VANNONI, MAURIZIO MOLESINI, GIUSEPPE SCIORTINO, SILVIO LAGOMARSINO, STEFANO P. Olivero mostra contributor esterni nascondi contributor esterni
Autori:	VANNONI, MAURIZIO; MOLESINI, GIUSEPPE; SCIORTINO, SILVIO; LAGOMARSINO, STEFANO; P. Olivero
Anno di registrazione:	2009
Rivista:	PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Titolo del libro:	Volume 7389 Optical Measurement Systems for Industrial Inspection VI
Titolo del congresso:	Optical Measurement Systems for Industrial Inspections VI, SPIESPIE
Luogo del congresso:	Munich, Germany
Data del congresso:	15-18 June 2009
Abstract:	Mono and polycrystalline Chemical Vapor Deposited (CVD) diamond is a promising material for several advanced topics: microchips substrate, biological applications, UV and particle detection. Commercial CVD diamonds are available in small square size, commonly 3-5 millimeters side and 0.5-1.5 millimeters thickness. To improve diamond reliability for described applications, it is important to have a quality control on diamond samples, not only for electrical constants but also for optical characteristics and surface roughness. In this paper we present an optical characterization method based on interferometric instruments, to measure surface structure and internal homogeneity of mono ad polycrystalline commercial CVD diamonds, with measurement examples.
Handle:	http://hdl.handle.net/2158/387785
Appare nelle tipologie:	4a - Articolo in atti di congresso

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