The paper concerns the fabrication of pyroelectric sensor arrays for IR radiation measurements. A microfabrication technology was developed to design the array elements directly on the polymer pyroelectric material (PVDF). This technology is based on the laser ablation of the metallized electrodes. This fabrication process is rapid, repeatable and low cost. Sensor prototypes have been bonded between two rigid PCBs in order to connect the active elements to a standard connector and packaging solutions based on PCB are presented. Microdrilling is proposed for microvias fabrication in matrices with elements of 100 micron^2 area.
MICROFABRICATION TECHNOLOGY FOR POLYMER PYROELECTRIC SENSOR ARRAYS / L. Capineri; L. Masotti; M. Mazzoni; G. Masotti. - STAMPA. - (2003), pp. 147-150. (Intervento presentato al convegno 1.14th Micromechanics Europe Workshop (MME'03) tenutosi a DELFT, The Netherland nel 2-4 november 2003).
MICROFABRICATION TECHNOLOGY FOR POLYMER PYROELECTRIC SENSOR ARRAYS
CAPINERI, LORENZO;MASOTTI, LEONARDO;
2003
Abstract
The paper concerns the fabrication of pyroelectric sensor arrays for IR radiation measurements. A microfabrication technology was developed to design the array elements directly on the polymer pyroelectric material (PVDF). This technology is based on the laser ablation of the metallized electrodes. This fabrication process is rapid, repeatable and low cost. Sensor prototypes have been bonded between two rigid PCBs in order to connect the active elements to a standard connector and packaging solutions based on PCB are presented. Microdrilling is proposed for microvias fabrication in matrices with elements of 100 micron^2 area.File | Dimensione | Formato | |
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MME03_P150.pdf
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MME03_COVER.pdf
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MME03_P147.pdf
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MME03_p148-149.pdf
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