An accurate control of the optical properties of single crystal diamond during microfabrication processes such as ion implantation plays a crucial role in the engineering of integrated photonic devices. In this work we present a systematic study of the variation of both real and imaginary parts of the refractive index of single crystal diamond, when damaged with 2 and 3 MeV protons at low-medium fluences (range: 1015 - 1017 cm−2). After implanting in 125 × 125 μm2 areas with a scanning ion microbeam, the variation of optical pathlength of the implanted regions was measured with laser interferometric microscopy, while their optical transmission was studied using a spectrometric set-up with micrometric spatial resolution. On the basis of a model taking into account the strongly non-uniform damage profile in the bulk sample, the variation of the complex refractive index as a function of damage density was evaluated.
Complex refractive index variation in proton-damaged diamond / S. Lagomarsino; P. Olivero; S. Calusi; D. Gatto Monticone; L. Giuntini; M. Massi; S. Sciortino; A. Sytchkova; A. Sordini; M. Vannoni. - In: OPTICS EXPRESS. - ISSN 1094-4087. - ELETTRONICO. - 20:(2012), pp. 19382-19394. [10.1364/OE.20.019382]
Complex refractive index variation in proton-damaged diamond
LAGOMARSINO, STEFANO;CALUSI, SILVIA;GIUNTINI, LORENZO;MASSI, MIRKO;SCIORTINO, SILVIO;
2012
Abstract
An accurate control of the optical properties of single crystal diamond during microfabrication processes such as ion implantation plays a crucial role in the engineering of integrated photonic devices. In this work we present a systematic study of the variation of both real and imaginary parts of the refractive index of single crystal diamond, when damaged with 2 and 3 MeV protons at low-medium fluences (range: 1015 - 1017 cm−2). After implanting in 125 × 125 μm2 areas with a scanning ion microbeam, the variation of optical pathlength of the implanted regions was measured with laser interferometric microscopy, while their optical transmission was studied using a spectrometric set-up with micrometric spatial resolution. On the basis of a model taking into account the strongly non-uniform damage profile in the bulk sample, the variation of the complex refractive index as a function of damage density was evaluated.File | Dimensione | Formato | |
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oe-20-17-19382_Complex refractive index variation in proton damaged diamond.pdf
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