Performances of a thinned back-illuminated ion-implanted CCD as detector for a normal incidence EUV spectrograph Measurement

The first application of a thinned back-illuminated ion-implanted and laser annealed cco as a detector for extreme ultraviolet spectroscopy is described. The observed stigmatic spectra are in the 40-70 nm region and are produced by the excitation of some noble gases in an open hollow cathode source installed in a normal incidence toroidal grating spectrograph. The results are compared with spectra obtained by other detector systems applied to the same instrumentation, showing that the ceo offers a much greater detection capability than a system using a converting scintillator and a comparable one with respect to a photon counting detector.