The performances of a pair of thinned back-illuminated ion-implanted and laser annealed CCDs have been evaluated in the EUV spectral region. Both the devices have been manufactured by EEV and one of them was also treated with the new technique of anodic etching to improve its quantum efficiency. The measurements performed consist mainly of the determination of the CCD quantum efficiency in the 300-2500 A region. These tests have been performed by means of a new vacuum test facility and a new CCD controller realized in our laboratories which is interfaced with a PC; moreover, to have a low noise, both the CCDs have worked in a slow scan mode and have been cryogenically cooled. The results show that a CCD quantum efficiency decreasing during the tests is present, but demonstrate also that these devices can have a lot of capabilities as EUV detectors.

Performances of ion-implanted CCDs in the EUV spectral region / Naletto, G.; Pace, Emanuele; Tondello, G.; Boscolo, A.; Bonanno, G.. - STAMPA. - (1994), pp. 98-107. (Intervento presentato al convegno SPIE Proc. "X-Ray and Ultraviolet Detectors" tenutosi a San Diego (USA) nel 1994) [10.1117/12.180004].

Performances of ion-implanted CCDs in the EUV spectral region

PACE, EMANUELE;
1994

Abstract

The performances of a pair of thinned back-illuminated ion-implanted and laser annealed CCDs have been evaluated in the EUV spectral region. Both the devices have been manufactured by EEV and one of them was also treated with the new technique of anodic etching to improve its quantum efficiency. The measurements performed consist mainly of the determination of the CCD quantum efficiency in the 300-2500 A region. These tests have been performed by means of a new vacuum test facility and a new CCD controller realized in our laboratories which is interfaced with a PC; moreover, to have a low noise, both the CCDs have worked in a slow scan mode and have been cryogenically cooled. The results show that a CCD quantum efficiency decreasing during the tests is present, but demonstrate also that these devices can have a lot of capabilities as EUV detectors.
1994
Proceedings SPIE Volume 2278, X-Ray and UV Detectors
SPIE Proc. "X-Ray and Ultraviolet Detectors"
San Diego (USA)
1994
Naletto, G.; Pace, Emanuele; Tondello, G.; Boscolo, A.; Bonanno, G.
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Utilizza questo identificatore per citare o creare un link a questa risorsa: https://hdl.handle.net/2158/780903
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