We present the fabrication and characterization of opto-mechanical micro-resonators developed to detect radiation-pressure coupling between light and a macroscopic body. The major achievements of this work are the development of complex high aspect ratio shapes by using the deep-RIE Bosch process and the integration of a high-reflectivity dielectric mirror. The micro-resonators were used as an end-mirror of a Fabry–Perot cavity, attaining an optical finesse of about 6 × 104, and at cryogenic temperature (about 10 K) we measured a mechanical quality factor up to 2 × 106 at about 90 kHz. These features make our devices particularly suitable for experiments on quantum-opto-mechanics.
Fabrication of low loss MOMS resonators for quantum optics experiments / E Serra;A Bagolini;A Borrielli;M Boscardin;F S Cataliotti;F Marin;F Marino;A Pontin;G A Prodi;M Vannoni;M Bonaldi. - In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING. - ISSN 0960-1317. - STAMPA. - 23:(2013), pp. 085010-1-085010-12. [10.1088/0960-1317/23/8/085010]
Fabrication of low loss MOMS resonators for quantum optics experiments
CATALIOTTI, FRANCESCO SAVERIO;MARIN, FRANCESCO;
2013
Abstract
We present the fabrication and characterization of opto-mechanical micro-resonators developed to detect radiation-pressure coupling between light and a macroscopic body. The major achievements of this work are the development of complex high aspect ratio shapes by using the deep-RIE Bosch process and the integration of a high-reflectivity dielectric mirror. The micro-resonators were used as an end-mirror of a Fabry–Perot cavity, attaining an optical finesse of about 6 × 104, and at cryogenic temperature (about 10 K) we measured a mechanical quality factor up to 2 × 106 at about 90 kHz. These features make our devices particularly suitable for experiments on quantum-opto-mechanics.File | Dimensione | Formato | |
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