A Micro-Opto-Mechanical-System (MOMS) based technology for the fabrication of Fabry-Perot interferometers on optical fiber is presented. Exploiting silicon micromachining techniques, the fabrication of ultrasonic receiver arrays suitable for wideband and high performance applications is demonstrated. Thanks to their high miniaturization level, the devices presented may be suited to minimally invasive endoscopic applications in medicine.
Miniaturized fiber-optic ultrasound probes for endoscopic tissue analysis by micro-opto-mechanical technology / Vannacci E.; Belsito L. ; Mancarella F.; Ferri M.; Veronese G.P.; Roncaglia A.; Biagi E.. - In: BIOMEDICAL MICRODEVICES. - ISSN 1387-2176. - STAMPA. - 16:(2014), pp. 415-426. [10.1007/s10544-014-9844-6]
Miniaturized fiber-optic ultrasound probes for endoscopic tissue analysis by micro-opto-mechanical technology
VANNACCI, ENRICO;BIAGI, ELENA
2014
Abstract
A Micro-Opto-Mechanical-System (MOMS) based technology for the fabrication of Fabry-Perot interferometers on optical fiber is presented. Exploiting silicon micromachining techniques, the fabrication of ultrasonic receiver arrays suitable for wideband and high performance applications is demonstrated. Thanks to their high miniaturization level, the devices presented may be suited to minimally invasive endoscopic applications in medicine.
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