MEMS-based Capacitive Micromachined Ultrasonic Transducer (CMUT) technology enables the development of advanced transducer-electronics integrated multi-chip modules (MCM) for medical imaging applications. In this paper, we present the design, fabrication and characterization of a 256-element CMUT spiral array integrated with a 256-channel analog front end (AFE) ASIC featuring highvoltage unipolar pulsers, low-noise amplifiers and a programmable transmit beamformer. The spiral array, designed to perform volumetric beam steering at 7 MHz, is characterized by a density-tapered layout of 220μm -wide hexagonal elements distributed over a quasi-circular area of 10 mm diameter. The CMUT and the AFE were co-designed, fabricated and interconnected through an acoustically optimized 3-D packaging method. The resulting MCM was electromechanically and acoustically characterized, demonstrating the potential of the proposed approach for integrated 2-D CMUT array fabrication.

A 256-element spiral CMUT array with integrated analog front end and transmit beamforming circuits / Savoia, Alessandro Stuart; Boni, Enrico; Sautto, Marco; Quaglia, Fabio; Mauti, Barbara; Ramalli, Alessandro; Matrone, Giulia; Caliano, Giosué; Fanm, Luca; Guanziroli, Fedenco; Bardelli, Roberto; Mazzanti, Andrea; Bagolim, Alvise; Passi, Stefano; Bellutti, Pierluigi; Tortoli, Piero. - ELETTRONICO. - 2018-:(2018), pp. 206-212. (Intervento presentato al convegno 2018 IEEE International Ultrasonics Symposium, IUS 2018 tenutosi a jpn nel 2018) [10.1109/ULTSYM.2018.8579867].

A 256-element spiral CMUT array with integrated analog front end and transmit beamforming circuits

Savoia, Alessandro Stuart;Boni, Enrico;Ramalli, Alessandro;Tortoli, Piero
2018

Abstract

MEMS-based Capacitive Micromachined Ultrasonic Transducer (CMUT) technology enables the development of advanced transducer-electronics integrated multi-chip modules (MCM) for medical imaging applications. In this paper, we present the design, fabrication and characterization of a 256-element CMUT spiral array integrated with a 256-channel analog front end (AFE) ASIC featuring highvoltage unipolar pulsers, low-noise amplifiers and a programmable transmit beamformer. The spiral array, designed to perform volumetric beam steering at 7 MHz, is characterized by a density-tapered layout of 220μm -wide hexagonal elements distributed over a quasi-circular area of 10 mm diameter. The CMUT and the AFE were co-designed, fabricated and interconnected through an acoustically optimized 3-D packaging method. The resulting MCM was electromechanically and acoustically characterized, demonstrating the potential of the proposed approach for integrated 2-D CMUT array fabrication.
2018
IEEE International Ultrasonics Symposium, IUS
2018 IEEE International Ultrasonics Symposium, IUS 2018
jpn
2018
Savoia, Alessandro Stuart; Boni, Enrico; Sautto, Marco; Quaglia, Fabio; Mauti, Barbara; Ramalli, Alessandro; Matrone, Giulia; Caliano, Giosué; Fanm, Luca; Guanziroli, Fedenco; Bardelli, Roberto; Mazzanti, Andrea; Bagolim, Alvise; Passi, Stefano; Bellutti, Pierluigi; Tortoli, Piero
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Utilizza questo identificatore per citare o creare un link a questa risorsa: https://hdl.handle.net/2158/1151394
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