Additive Manufacturing Electronics for Packaging High-Frequency Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducer Probes

Additive Manufacturing Electronics (AME) is a promising method that has the potential to directly embed piezoelectric micromachined ultrasonic transducer (PMUT) probes into conventional electronic circuits and boards. It enables fast customized prototyping, three-dimensional circuit boards, and small-series production. In this study, annular probes composed of circular suspended Aluminum Nitride (AlN)-based PMUT membranes, addressed in 2-dimensional arrays, were designed, fabricated, and encapsulated using AME technology.